OEE in a fab or OSAT: the six losses, explained.

Expensive tools are only as valuable as the good output they produce. Overall equipment effectiveness shows where the rest goes.

In brief
  • OEE multiplies availability, performance and quality.
  • Each factor hides two of the six standard losses.
  • The bottleneck tool’s OEE sets the whole line’s output.
  • Many losses are people and practice, not machine.
OEE=Availability×Performance×Quality
Planned production time
Run timeAvailability lossBreakdowns. Set-ups and adjustments.
Net run timePerformance lossSmall stops. Running below rated speed.
Fully productive timeQuality lossStart-up rejects. Production rejects.

Bar lengths are illustrative. The six losses are the standard categories used in equipment-effectiveness work.

Fig. 01From planned time to fully productive time. Each step down is one family of loss.

The six losses on a semiconductor floor

Availability

Breakdowns

Unplanned downs: a failed part, an alarm nobody on shift can clear.

Availability

Set-ups and adjustments

Recipe changes, chamber seasoning, qualification runs after maintenance.

Performance

Small stops

Idle waiting for a FOUP, an operator or a material.

Performance

Reduced speed

Running below rated throughput, often to protect yield.

Quality

Start-up rejects

Monitor wafers and first units after a restart.

Quality

Production rejects

Rework and scrap during steady running.

Where to start

  1. Start at the bottleneck. An hour gained elsewhere is an hour of more waiting.
  2. Log the reason for every stop. Without reasons, OEE is a score, not a diagnosis.
  3. Look at shifts separately. The same tool often runs very differently by shift, which points to skills cover.

This is the volume branch of our loss tree.

Next step

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