From crate to first wafer: tool move-in and hook-up, step by step.
A new line installs its tools in waves. Each tool walks the same nine steps, and each step has a different owner.
In brief
- Move-in puts the tool on its pedestal; hook-up connects it to every utility.
- Leak and safety checks gate power-on. Nothing is skipped.
- Vendor acceptance proves the tool; process qualification proves your recipes.
- Your technicians should be there from move-in, not from release.
- 01ArrivalCrates received and inspected.
- 02Move-inRigged into the cleanroom.
- 03Set and levelOn its pedestal, levelled.
- 04Hook-upPower, water, exhaust, gases, chemicals, vacuum.
- 05Leak and safety checksEvery joint tested and signed off.
- 06Power onFirst start-up by the vendor.
- 07AcceptanceTool meets its vendor specification.
- 08Process qualificationRuns your recipes to your specification.
- 09ReleaseHanded to production.
Who owns which step
| Step | Usually owned by | Where delays start |
|---|---|---|
| Arrival, move-in, set | Tool vendor with riggers | Access routes and floor loading not ready |
| Hook-up | Licensed hook-up contractor | Utility points not commissioned |
| Leak and safety checks | Contractor and fab safety team | Documents incomplete at sign-off |
| Power-on and acceptance | Tool vendor | Spares or consumables missing |
| Process qualification | Fab process and equipment engineers | Engineers or certified operators not yet hired |
Where we fit
Hook-up design and execution belong to licensed contractors. We staff the crews and project leads around them, track readiness across all tools, and make sure your own technicians learn each tool while it is being installed. Ramp support.